2D Particle-in-cell Simulations of Geometrically Asymmetric Low-Pressure Capacitive RF Plasmas Driven by Tailored Voltage Waveforms
PLASMA SOURCES SCIENCE & TECHNOLOGY（2021）
关键词
capacitively coupled plasmas,geometrically asymmetric capacitively coupled plasmas,2D simulations,voltage waveform tailoring,realistic plasma-surface interactions
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