Frequency Output, A Multi-Modes Vacuum Gauge with Highly Output Linearity Based on Electrostatic Nonlinearity.
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)（2021）
关键词
multimodes vacuum gauge,electrostatic nonlinearity,MEMS resonant vacuum gauge,RVG,low vacuum measurement,low power consumption,embedded measurement,multiworking modes,second-order resonant mode,fourth mode,linear fitting shows,pressure 1.0 Pa to 500 Pa
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