Design of a Novel Closed-Loop Electrostatic Voltage Sensor Based on Weakly Coupled Resonators.

Zilong Wang, Zhengwei Wu,Xiangming Liu,Yahao Gao,Simin Peng, Ren,Fengjie Zheng,Yao Lv,Jun Liu,Hucheng Lei,Zhouwei Zhang,Wei Zhang,Jiachen Li,Chunrong Peng

2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)（2021）

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Key words

closed-loop electrostatic voltage sensor,weakly coupled resonators,electrically weakly coupled resonator,MEMS static voltage sensor,mode localization effect,three-degree-of-freedom micromechanical sensor,voltage measurement,open-loop testing,voltage sensitivity

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