Optimization of Fabrication Process for SiON/SiOx Films Applicable As Optical WaveguidesL'ubos Podlucky,Andrej Vincze,Sona Kovacova,Juraj Chlpik,Jaroslav Kovac,Frantisek UherekCOATINGS（2021）引用 10|浏览24关键词waveguide,AFM,SIMS,PECVD,silicon oxynitrideAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
