Crystalline Defect Analysis in Epitaxial Si0.7Ge0.3 Layer Using Site-Specific ECCI-STEM

Han,Libor Strakos,Thomas Hantschel,Clement Porret,Tomas Vystavel,Roger Loo,Matty Caymax

Micron（2021）

引用 4|浏览14

关键词

Electron channeling contrast imaging,Scanning transmission electron microscopy in SEM,Site-specific FIB sample preparation,ECCI information depth,Crystalline defect analysis

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