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Si Capacitive Modulator Integration in a 300mm Silicon Photonics Platform with Strained-Sige to Enhance the Electro-Optic Effect

I Charlet, M. Douix,S. Guerber,N. Michit,C. Barrera, J. Gaudy,Y. Desieres,S. Kerdiles, P. Acosta-Abla,J. Lassarre,C. Perrot, C. Euvard-Colnat, K. Rovayaz,D. Pellissier-Tanon,S. Cremer,N. Vulliet,P. Grosse,S. Monfray,S. Messaoudene,L. Vivien,B. Szelag,D. Marris-Morini,F. Boeuf

Integrated Photonics Platforms Fundamental Research, Manufacturing and Applications（2020）

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关键词
Modulator,data centers,free carrier plasma dispersion,capacitive modulator,strained SiGe
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