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Self-regulated Parallel Process 3-D Array Microfabrication with Metal Direct-Write

Yong Zhang,Yen-Po Lin,Xianyun Zhang,Yifan Zhang,Jianjun Guo

APPLIED MATERIALS TODAY（2021）

Cited 7|Views14
Key words
Meniscus-confined direct-write,Parallel process,Metal microstructures,Electrodeposition,Self-regulating
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