Wafer-level Uniformity of Atomic-Layer-deposited Niobium Nitride Thin Films for Quantum DevicesEmanuel Knehr,Mario Ziegler,Sven Linzen,Konstantin Ilin, Patrick Schanz,Jonathan Plentz,Marco Diegel,Heidemarie Schmidt,Evgeni Il'ichev,Michael SiegelJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A（2021）引用 17|浏览20AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
