In-Situ Encrypted NAND FeFET Array for Secure Storage and Compute-in-Memory
2023 International Electron Devices Meeting (IEDM)（2023）
Key words
Ferroelectric Field-effect Transistor,Operationalized,Flash Memory,Read Operation,Encryption And Decryption,Inference Accuracy,Atomic Layer Deposition,Non-volatile Memory,Read Voltage,Gate Pulse,Buffered Oxide Etchant
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