谷歌浏览器插件
订阅小程序
在清言上使用
VIPCreated with Sketch.

CNT EUV Pellicle Tunability and Performance in a Scanner-Like Environment

Marina Y. Timmermans,Ivan Pollentier,Maxim Korytov,Thomas Nuytten,Stefanie Sergeant,Thierry Conard,Johan Meersschaut,Yide Zhang,Masoud Dialameh,Wilfried Alaerts,Ehsan Jazaeri,Valentina Spampinato,Alexis Franquet,Steven Brems,Cedric Huyghebaert,Emily E. Gallagher

Journal of Micro/Nanopatterning Materials and Metrology（2021）

引用 4|浏览17
关键词
EUV pellicle,carbon nanotubes,free-standing film,EUV lithography,scanner environment,lifetime,mechanical stability,hydrogen plasma,coating
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要