Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Characterization of AlGaN/GaN Degradations During Plasma Etching for Power Devices

Frederic Le Roux,Nicolas Posseme,Pauline Burtin,Patrice Gergaud,Vincent Delaye

Microelectronic Engineering（2021）

Cited 8|Views6
Key words
Plasma etching,HEMT,AlGaN/GaN heterostructure,Plasma induced degradation,XPS,Degradation mechanism
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined