Fabrication of a monolithic silicon carbide implantable neural interface using soi for ease of manufacture

Mohammad Beygi,John T. Bentley,Christopher L. Frewin,Cary A. Kuliasha,Arash Takshi,Evans K. Bernardin,Francesco La Via,Jack Judy,Stephen E. Saddow

TECHNOLOGY AND INNOVATION（2021）

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关键词

Neural interface,Neural probe,Neural implant,Microelectrode array,MEA,SiC,3C-SiC,Doped SiC,N -type,P-type,Amorphous SiC,Epitaxial growth,Electrochemical characterization

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