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Introducing a Supercritical Fluid Technique to Reduce Passivation Layer Interface Defects in Passivated Emitter Rear Contact Cells

Chih Cheng Yang,Sheng Yao Chou, Chen,Shih Kai Lin,Sung Yu Chen,Shui Chin Liu,Kao Yuan Wang,Tsung Ming Tsai,Jen Wei Huang, Chang

Materials Science in Semiconductor Processing（2021）

Cited 5|Views11
Key words
Passivated emitter rear contact (PERC) cell,Supercritical fluid(SCF) technique,Solar cell,Al2O3,Passivation layer
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