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Hyperdoping of Silicon Films with Titanium Via Nanosecond-Laser Melting: Structure Evolution, Impurity Distribution, Sub-Bandgap Formation, and Doping Mechanism

C. Wen,Z. Q. Shi,J. X. Wang, J. L. Tang, Y. B. Zhang, Y. Jiang,Y. J. Ma,X. H. Li,W. B. Yang

Optics & Laser Technology（2021）

Cited 9|Views0
Key words
Silicon,Laser doping,Nanocrystalline film,Microstructure,Impurity distribution,Mechanism
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