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Bandwidth-tunable Silicon Nitride Microring Resonators

Chinese Physics B(2021)

Hunan Provincial Key Laboratory of Novel Nano-Optoelectronic Information Materials and Device

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Abstract
We designed a reconfigurable dual-interferometer coupled silicon nitride microring resonator. By tuning the integrated heater on interferometer’s arms, the “critical coupling” bandwidth of resonant mode is continuously adjustable whose quality factor varies from 7.9 × 104 to 1.9 × 105 with the extinction ratio keeping higher than 25 dB. Also a variety of coupling spanning from “under-coupling” to “over-coupling” were achieved, showing the ability to tune the quality factor from 6.0 × 103 to 2.3 × 105. Our design can provide an adjustable filtering method on silicon nitride photonic chip and contribute to optimize the nonlinear process for quantum photonics and all-optical signal processing.
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silicon nitride,microring resonators,Mach-Zehnder interferometer,ring filter,nonlinear optics
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