Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Scaled, Novel Effective Workfunction Metal Gate Stacks for Advanced Low-VT, Gate-All-Around Vertically Stacked Nanosheet FETs with Reduced Vertical Distance Between Sheets

A. Veloso,E. Simoen, A. Oliveira,A. Chasin, S.-C. Chen, Y. Lin,T. Miyashita, M. Kim,D. Jang,R. Ritzenthaler, X. Zhou,H. Mertens,V. Pena,G. Santoro,K. Kenis,F. Sebaai,G. Mannaert,K. Devriendt,T. Hopf,J.J. Versluijs,O. Richard,J. Machillot, N. Yoshida,N. Horiguchi

Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials（2019）

Cited 9|Views2
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined