Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections

C K Hu,N Mazzeo,S Basavaiah,M B Small,K W Choi

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS（1990）

Cited 8|Views2
Key words
local interconnections,tin/alcu/si
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined