Deep Learning Models for Data-Driven Laser Induced Breakdown Spectroscopy (LIBS) Analysis of Interstitial Oxygen Impurities in Czochralski-Si Crystals

APPLIED SPECTROSCOPY（2022）

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Laser-induced breakdown spectroscopy,LIBS,deep learning models,one-dimensional,1D,convolutional neural network,CNN,least absolute shrinkage and selection operator,LASSO,interstitial oxygen,Czochralski-Si crystals

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