Capacitance Characterization of Gate to LDD Overlap Region to Understand Subtle Fail Modes in Advanced Node Technologies

Satish Kodali,Edmund Banghart,Kevin Davidson, Yu Zhang,Jagar Singh,Chong Khiam Oh

International Symposium for Testing and Failure Analysis ISTFA 2019 Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis（2019）

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