Application of the Plasma Surface Sintering Conditions in the Synthesis of ReBx–Ti Targets Employed for Hard Films Deposition in Magnetron Sputtering Technique
International Journal of Refractory Metals and Hard Materials（2022）
关键词
Plasma surface sintering,Powder target,Gas injection magnetron sputtering,Rhenium diboride phase,Titanium diboride phase,Mechanical properties
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