Two-Photon Optical Beam Induced Current for Circuit Level Verification and Validation of a 130 Nm Microelectronic Device

Jeffrey Simon, Noah Mun,Anthony George,Josh Baur, James Busch, Christian Meadows,Katie Liszewski, Isabel Boona, Kurtis Wickey,Thomas Kent,Adam Kimura,Jamin McCue,Glen David Via,Brian Dupaix

PROCEEDINGS OF THE 2021 IEEE INTERNATIONAL CONFERENCE ON PHYSICAL ASSURANCE AND INSPECTION ON ELECTRONICS (PAINE)（2021）

Battelle Mem Inst | AFRL RYDT

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Abstract

The application of Two-photon Optical Beam Induced Current (TOBIC) as a hybrid physical/functional tool for post-silicon verification of Integrated Circuits (ICs) is presented in this work. This technique generates an image by detecting the electrical response induced when a laser raster scans across the devices. A Conditional General Adversarial Network (CGAN) is trained with reference image pairs of the GDSII design and TOBIC device signature images to generate a predictive model valid for any design based in the node technology. The model predicts the TOBIC signature response of a different IC when the GDSII design is inputted. The predicted signature is compared to the actual signature of the fabricated design to ensure the IC was fabricated as intended. The comparison is used to quickly identify anomalies between the two; thus, flagging the areas that require deeper investigative analysis.

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Key words

Optical Beam Induced Current,Microelectronics,Post-Silicon Verification and Validation,Assurance,Integrated Circuits,CGAN,neural networks

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