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Hybrid Deep Learning Crystallographic Mapping of Polymorphic Phases in Polycrystalline Hf0.5Zr0.5O2 Thin Films

SMALL(2022)

Cited 9|Views39
Key words
4D-scanning transmission electron microscopy position-averaged convergent beam electron diffraction,deep learning,HfO,(2)-based ferroelectrics,polycrystalline thin films,symmetry mapping
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