Reconfigurable Si-based Active Metasurface with Ultra Low Loss and Crosstalk for LiDAR
2021 IEEE International Electron Devices Meeting (IEDM)（2021）
Key words
phase modulation,LiDAR,solid-state spatial light modulator,plasmonic antenna array,beam shaping,reflection efficiency,asymmetric resonator,p-i-n diode structure,distributed Bragg reflector,reconfigurable silicon-based active metasurface,maximum side-mode-suppression-ratio,far-field pattern,crosstalk,Si
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