Bulk-Si Platform: Born for DRAM, Upgraded with On-Chip Lasers, and Transplanted to LiDAR
Journal of Lightwave Technology(2022)
Key words
Photonics,Random access memory,Silicon,Substrates,Costs,Laser radar,Transistors,DRAM,heterogeneous integration,LiDAR,opti- cal interconnect,silicon photonics
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