Recessed-Channel WSe2 Field-Effect Transistor Via Self-Terminated Doping and Layer-by-Layer Etching
ACS nano（2022）
Key words
tungsten diselenide,van der Waals materials,recess-channel,chemical etch,contact resistance,field-effect transistors
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined