Research on MEMS Electric Field Sensor with Low Driving Voltage Based on Lead Zirconate Titanate
JOURNAL OF ELECTRONICS & INFORMATION TECHNOLOGY（2023）
Key words
Electric field sensor,Lead Zirconate Titanate (PZT),Micro-Electro-Mechanical System (MEMS),Low driving voltage
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined