Erratum to “nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes” [oct 20 1118-1120]
Journal of Microelectromechanical Systems（2021）
Key words
Micromechanical devices,Microelectromechanical systems,Epitaxial growth
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined