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Towards a Deep Understanding of Oxidation in the Material Removal of GCr15 Bearing Steel During Chemical Mechanical Polishing

Gangguo Xiao,Liang Jiang,Wumao Peng,Jinwei Liu,Changbang Deng,Linmao Qian

Wear（2022）

Cited 3|Views8
Key words
Chemical mechanical polishing,Oxidation,Material removal,Bearing steel
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