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High Throughput Microwave Plasma Assisted Sputter Deposition of Linear Variable Filters and Deployment into Visible and Near Infrared Spectrometers

Lewis Fleming,Des Gibson,Shigeng Song,David Hutson,Sam Ahmadzadeh,Sijia Cai,Daxing Han,Ewan Waddell, John Saffell

Optical Interference Coatings Conference (OIC) 2022（2022）

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