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Modulating the Microscopic Lattice Distortions Through the Al-rich Layers for Boosting the Ferroelectricity in Al:HfO2 Nanofilms

JOURNAL OF PHYSICS D-APPLIED PHYSICS(2022)

Cited 5|Views7
Key words
ferroelectric,HfO2 thin film,Al-rich layers,microscopic lattice distortions,large-scale density functional theory
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