Oxide-filled trench isolation planarized using chemical/mechanical polishingJ. Pierce,P. Renteln, W. Burger,S. Ahnmsra(1991)引用 29|浏览5关键词chemical mechanical polishingAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要