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Enabling On-Device and Target-Free Overlay Measurement from CD-SEM Contours

Thibaut Bourguignon,Regis Bouyssou,Jonathan Pradelles,Sebastien Berard-Bergery,Bertrand Le-Gratiet,Romain Bange,Nivea G. Schuch,Thiago Figueiro,Nicolas Posseme

Metrology, Inspection, and Process Control XXXVI（2022）

Cited 5|Views6
Key words
On-Device Overlay,Target-less,CD-SEM,Computational Metrology,Contour Metrology,On-product Overlay
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