Photonic Crystals Based on Silicon Nanoholes Array for Biosensing Applications
2022 Sixteenth International Congress on Artificial Materials for Novel Wave Phenomena (Metamaterials)（2022）
Key words
near-infrared spectra,analyte molecules,deionized water,refractive index,surface sensitivity,oxide layers,atomic layer deposition,phosphate-buffered saline solutions,silicon nanoholes array,biosensing applications,photonic crystal structures,deep-UV lithography,dry etch techniques,semiconductor materials,Si
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