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Implementation of High-Performance and High-Yield Nanoscale Hafnium Zirconium Oxide Based Ferroelectric Tunnel Junction Devices on 300 Mm Wafer Platform

Maximilian Liehr,Jubin Hazra,Karsten Beckmann,Vineetha Mukundan,Ioannis Alexandrou, Timothy Yeow,Joseph Race,Kandabara Tapily,Steven Consiglio,Santosh K. Kurinec,Alain C. Diebold,Nathaniel Cady

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（2023）

引用 3|浏览56
关键词
Hafnium Oxide,Field-Effect Transistors
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