Challenges in Atomic Layer Etching of Gallium Nitride Using Surface Oxidation and Ligand-ExchangeDaniel C. Messina,Kevin A. Hatch,Saurabh Vishwakarma,David J. Smith,Yuji Zhao,Robert J. NemanichJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A（2023）引用 3|浏览24AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
