Using SiNx Double-Layer Deposition to Reduce Electrode Incidence of Short Circuits Due to Impurity Particles in Thin Film Transistor Preparation
Current Applied Physics（2023）
关键词
TFT,Poor dot line,Double-layer deposition,Short circuit,SiNx
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要