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Localized Thermal Effects in Gate-all-around Devices

Colin Landon,Lei Jiang,Daniel Pantuso,Inanc Meric, Kam Komeyli,Jeffrey Hicks, Daniel Schroeder

2023 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS(2023)

Cited 5|Views4
Key words
Nanowires,self-heat,transistor,gate-all-around,reliability
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