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Influence of Phase State, Conducting Sublayer Material and Deposition Method on Mechanical Properties and Adhesion of Ge2sb2te5 Thin Films

Alexey Yakubov,Petr Lazarenko, Elena Kirilenko,Irina Sagunova,Alexey Babich,Alexey Sherchenkov

Current Applied Physics（2024）

Cited 0|Views17
Key words
Ge 2 Sb 2 Te 5,Chalcogenides,Surfaces,Thin films,Mechanical properties,Adhesion strength
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