Impact of Design and Process on Alpha-Induced SER in 4 Nm Bulk-FinFET SRAM.
2023 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS（2023）
Key words
alpha irradiation test,alpha-induced SER,alpha-induced soft error rate,bulk-FinFET SRAM,fin-pitch shrinking,process technology,size 4.0 nm to 130.0 nm
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