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Multi-technique Characterisation of InAs-on-GaAs Wafers with Circular Defect Pattern

Jacek Boguski,Jaroslaw Wrobel,Sebastian Zlotnik,Boguslaw Budner,Malwina Liszewska,Lukasz Kubiszyn,Pawel P. Michalowski,Lukasz Ciura,Pawel Moszczynski, Sebastian Odrzywolski,Bartlomiej Jankiewicz,Jerzy Wrobel

OPTO-ELECTRONICS REVIEW（2023）

引用 0|浏览30
关键词
Wafer homogeneity,wafer defect pattern,surface roughness,indium arsenide,beryllium doping
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