Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material.
MICROMACHINES（2023）
Key words
nanoporous alumina structures,ellipsometric spectroscopy,atomic layer deposition,photoluminescence,optical properties
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined