Electron Beam Lithography and Dimensional Metrology for Spin-Based Quantum Devices on Ge, Ge/Si and Geoi SubstratesNikolay Petkov, Margarita Georgieva,Maksym Myronov,Sinan Bugu,Ray Duffy,Brendan McCarthy, Alan Hynes,Ann-Marie Kelleher,Graeme Maxwell,Giorgos Fagascrossref（2023）引用 0|浏览30AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
