WeChat Mini Program
Old Version Features

    • BAW RF Filter Based on Single Crystal AlN-on-SiC Resonator

    Rui Ding,Shurong Dong,Weipeng Xuan, Biao Zhang,Feng Gao,Hao Jin,Jikui Luo

    openalex（2022）

    Zhejiang University

    Cited 1|Views5
    Abstract
    This Letter reports a new bulk acoustic wave (BAW) filter based on single crystal AlN piezoelectric film which has the potential application in 5G wireless communication. The single crystal AlN is deposited on SiC substrate by MOCVD and the air-cavity structure BAW device is fabricated. Testing results show that the fabricated resonators have Q-factor up to 837 and electromechanical coupling coefficient up to 7.2% with resonant frequency 3.2 GHz. The ladder-type filters are also developed on the same wafer, which have a center frequency of 3.38 GHz and 3 dB bandwidth 160 MHz, minimum insertion loss of 1.5 dB, and out-of-band rejection above 31dB. High performance of the filters comes from low defects of the single crystal AlN film, which demonstrates promising potential of single crystal AlN filters in 5G and future 6G applications.
    More
    Translated text
    Key words
    Thin Film Resonators,Surface Acoustic Wave Sensors,Millimeter-Wave Applications
    求助PDF
    上传PDF
    View via Publisher
    Bibtex
    AI Read Science
    AI Summary
    AI Summary is the key point extracted automatically understanding the full text of the paper, including the background, methods, results, conclusions, icons and other key content, so that you can get the outline of the paper at a glance.
    Example
    Background
    Key content
    Introduction
    Methods
    Results
    Related work
    Fund
    Key content
    • Pretraining has recently greatly promoted the development of natural language processing (NLP)
    • We show that M6 outperforms the baselines in multimodal downstream tasks, and the large M6 with 10 parameters can reach a better performance
    • We propose a method called M6 that is able to process information of multiple modalities and perform both single-modal and cross-modal understanding and generation
    • The model is scaled to large model with 10 billion parameters with sophisticated deployment, and the 10 -parameter M6-large is the largest pretrained model in Chinese
    • Experimental results show that our proposed M6 outperforms the baseline in a number of downstream tasks concerning both single modality and multiple modalities We will continue the pretraining of extremely large models by increasing data to explore the limit of its performance
    Upload PDF to Generate Summary
    Must-Reading Tree
    Example
    Generate MRT to find the research sequence of this paper
    Data Disclaimer
    The page data are from open Internet sources, cooperative publishers and automatic analysis results through AI technology. We do not make any commitments and guarantees for the validity, accuracy, correctness, reliability, completeness and timeliness of the page data. If you have any questions, please contact us by email: report@aminer.cn
    Chat Paper
    Summary is being generated by the instructions you defined