Change with the Reactive Deposition Mode in Crystallographic and Mechanical Properties of Titanium Aluminum Nitride Coatings Obtained Via Grid-Assisted Magnetron Sputtering
MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS（2023）
关键词
Ti(1-x)AlxN,Grid-assisted magnetron sputtering,Reactive sputter deposition,Crystallographic orientation
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