Wafer‐Level Manufacturing of MEMS H2 Sensing Chips Based on Pd Nanoparticles Modified SnO2 Film Patterns
ADVANCED SCIENCE（2023）
关键词
film patterns,H-2 sensing chips,high-consistency,micro-electro-mechanical systems,wafer-level
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要