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一种压电驱动单屏蔽电极3维电场传感芯片

PENG Simin,XIA Shanhong,LIU Xiangming,GAO Yahao,ZHANG Zhouwei, ZHANG Wei,XING Xuebin, LIU Yufei,WU Zhengwei,PENG Chunrong

Journal of Electronics & Information Technology（2023）

Cited 0|Views25
Key words
Single shielding electrode,Three-dimensional,Electric field,Vertical vibration
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