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Small Target Compatible Dimensional and Analytical Metrology for Semiconductor Nanostructures Using X-Ray Fluorescence Techniques

Philipp Hoenicke,Yves Kayser,Victor Soltwisch, Andre Waehlish,Nils Wauschkuhn,Jeroen E. Scheerder,Claudia Fleischmann,Janusz Bogdanowicz,Anne-Laure Charley,Anabela Veloso,Roger Loo,Hans Mertens,Andriy Hikavyy,Thomas Siefke,Anna Andrle,Grzegorz Gwalt,Frank Siewert,Richard Ciesielski,Burkhard Beckhoff

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII（2023）

Cited 1|Views0

Key words

X-ray fluorescence,nanostructure metrology,compositional analysis

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