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Deep Learning-Based Automatic Defect Classification for Semiconductor Manufacturing

Eunpa Kim,Myungchul Shin,Hee-Jun Ahn,Soyoon Park,Dong-Ryul Lee,Haesung Park, Minjung Shin,Dongchul Ihm

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII（2023）

引用 1|浏览7
关键词
Automatic defect classification,Deep learning,Semiconductor manufacturing
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