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Mechanistic Study of the Atomic Layer Deposition of Cobalt: A Combined Mass Spectrometric and Computational Approach

Sofia Donnecke,Mathias Paul,Peter J. H. Williams, Serena Chan, Veronica Tse, Jigyasa Sachdeva,Allen G. Oliver,J. Scott McIndoe,Irina Paci

Physical Chemistry Chemical Physics（2024）

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Key words
Atomic Layer Deposition
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