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Changing the Face of Phase Change Memory with Sb2Te3/TiTe2 Superlattices

2023 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC AND IEEE MATERIALS FOR ADVANCED METALLIZATION CONFERENCE, MAM, IITC/MAM(2023)

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Key words
Phase Change Memory,Superlattice,TDTR,pump-probe,in situ XRD
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